Papers › Reaction pathways of BCl₃ for acceptor delta-doping of silicon
Reaction pathways of BCl₃ for acceptor delta-doping of silicon
Quinn Campbell, Kevin J. Dwyer, Sungha Baek, Andrew D. Baczewski, Robert E. Butera, Shashank Misra
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BCl₃ is a promising candidate for atomic-precision acceptor doping in Si, but optimizing the electrical properties of structures created with this technique requires a detailed understanding of adsorption and dissociation pathways for this precursor. Here, we use density functional theory and scanning tunneling microscopy (STM) to identify and explore these pathways for BCl₃ on Si(100) at different annealing temperatures. We demonstrate that BCl₃ adsorbs selectively without a reaction barrier, and subsequently dissociates relatively easily with reaction barriers ≈1 eV. Using this dissociation pathway, we parameterize a Kinetic Monte Carlo model to predict B incorporation rates as a function of dosing conditions. STM is used to image BCl₃ adsorbates, identifying several surface configurations and tracking the change in their distribution as a function of the annealing temperature, matching predictions of the kinetic model well. This straightforward pathway for atomic-precision acceptor doping helps enable a wide range of applications including bipolar nanoelectronics, acceptor-based qubits, and superconducting Si.
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